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Crashing at Finalizing: "nlite.exe stopped working"


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i got a Server and need to Install Win2K3 x64 on it, it is in RAID so i have to Slipstream some Drivers to make it work.
When i select the Folder of the 2K3 Location it already goes : "nLite.exe has Experienced an Error and needs to be Closed." i put the Window Aside and Continue what im Doing.
I go all the was until the Making the Installation Part, and in there it goes almost complete at Finalizing but it just Stops.
I tried this in a Windows XP Pro vm and Windows 7 Pro Vm, with the Same Issues.

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