Huh, i answer myself. First I switched from RAR-SFX to 7Zip-SFX. Then for the x86-version i created a standard-sfx with the usual command Dism /online /enable-feature /featurename:NetFx3 /All /Source:%~dp0sxs /LimitAccess For the x64-version i do the same, except i used the "7zsd_LZMA_x64.sfx" for creating my SFX. Finally it's important to create a 64bit-sfx, if you plan to install it offline on 64bit--systems. so long